Inventor
VAIL ROBERT C
US8 patents
Patents
8 patentsUS6354240B1Mar 12, 2002
Plasma etch reactor having a plurality of magnets
TEGAL CORP57 citations95
US6190496B1Feb 20, 2001
Plasma etch reactor and method for emerging films
TEGAL CORP68 citations95
US6048435AApr 11, 2000
Plasma etch reactor and method for emerging films
TEGAL CORP58 citations95
US6620335B1Sep 16, 2003
Plasma etch reactor and method
TEGAL CORP23 citations92
US6410448B1Jun 25, 2002
Plasma etch reactor and method for emerging films
TEGAL CORP15 citations92
US6500314B1Dec 31, 2002
Plasma etch reactor and method
TEGAL CORP11 citations81
US6905969B2Jun 14, 2005
Plasma etch reactor and method
TEGAL CORP7 citations73
US7223699B2May 29, 2007
Plasma etch reactor and method
TEGAL CORP3 citations62