Inventor
OLSON KURT A
US8 patents
⚠️ This page may combine multiple inventors who share the name “OLSON KURT A”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TEGAL CORP
7 patentsUS6354240B1Mar 12, 2002
Plasma etch reactor having a plurality of magnets
TEGAL CORP57 citations95
US6620335B1Sep 16, 2003
Plasma etch reactor and method
TEGAL CORP23 citations92
US6500314B1Dec 31, 2002
Plasma etch reactor and method
TEGAL CORP11 citations81
US6046116AApr 4, 2000
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer
TEGAL CORP15 citations78
US6905969B2Jun 14, 2005
Plasma etch reactor and method
TEGAL CORP7 citations73
US6774046B2Aug 10, 2004
Method for minimizing the critical dimension growth of a feature on a semiconductor wafer
TEGAL CORP6 citations72
US7223699B2May 29, 2007
Plasma etch reactor and method
TEGAL CORP3 citations62