Inventor
SAJOTO TALEX
US26 patents
⚠️ This page may combine multiple inventors who share the name “SAJOTO TALEX”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
APPLIED MATERIALS INC
25 patentsUS6179924B1Jan 30, 2001
Heater for use in substrate processing apparatus to deposit tungsten
APPLIED MATERIALS INC324 citations99
US6129044AOct 10, 2000
Apparatus for substrate processing with improved throughput and yield
APPLIED MATERIALS INC578 citations99
US6099651AAug 8, 2000
Temperature controlled chamber liner
APPLIED MATERIALS INC360 citations99
US6056823AMay 2, 2000
Temperature controlled gas feedthrough
APPLIED MATERIALS INC167 citations99
US6035101AMar 7, 2000
High temperature multi-layered alloy heater assembly and related methods
APPLIED MATERIALS INC963 citations99
US5846332ADec 8, 1998
Thermally floating pedestal collar in a chemical vapor deposition chamber
APPLIED MATERIALS INC863 citations99
US6258170B1Jul 10, 2001
Vaporization and deposition apparatus
APPLIED MATERIALS INC307 citations98
US6189482B1Feb 20, 2001
High temperature, high flow rate chemical vapor deposition apparatus and related methods
APPLIED MATERIALS INC447 citations98
US6120609ASep 19, 2000
Self-aligning lift mechanism
APPLIED MATERIALS INC104 citations98
US6051286AApr 18, 2000
High temperature, high deposition rate process and apparatus for depositing titanium layers
APPLIED MATERIALS INC170 citations98
US5983906ANov 16, 1999
Methods and apparatus for a cleaning process in a high temperature, corrosive, plasma environment
APPLIED MATERIALS INC153 citations98
US5968379AOct 19, 1999
High temperature ceramic heater assembly with RF capability and related methods
APPLIED MATERIALS INC262 citations98
US5964947AOct 12, 1999
Removable pumping channel liners within a chemical vapor deposition chamber
APPLIED MATERIALS INC96 citations98
US6527865B1Mar 4, 2003
Temperature controlled gas feedthrough
APPLIED MATERIALS INC89 citations97
US6464795B1Oct 15, 2002
Substrate support member for a processing chamber
APPLIED MATERIALS INC98 citations97
US6066209AMay 23, 2000
Cold trap
APPLIED MATERIALS INC80 citations97
US6616767B2Sep 9, 2003
High temperature ceramic heater assembly with RF capability
APPLIED MATERIALS INC114 citations96
US6270859B2Aug 7, 2001
Plasma treatment of titanium nitride formed by chemical vapor deposition
APPLIED MATERIALS INC42 citations96
US6165271ADec 26, 2000
Temperature controlled process and chamber lid
APPLIED MATERIALS INC49 citations96
US6082714AJul 4, 2000
Vaporization apparatus and process
APPLIED MATERIALS INC32 citations96
US6063199AMay 16, 2000
Temperature controlled liner
APPLIED MATERIALS INC23 citations96
US5994678ANov 30, 1999
Apparatus for ceramic pedestal and metal shaft assembly
APPLIED MATERIALS INC89 citations95
US6077562AJun 20, 2000
Method for depositing barium strontium titanate
APPLIED MATERIALS INC19 citations93
US6123773ASep 26, 2000
Gas manifold
APPLIED MATERIALS INC10 citations82
US7094313B2Aug 22, 2006
Universal mid-frequency matching network
APPLIED MATERIALS INC3 citations62