Inventor
SCHWAB BRENT
US5 patents
⚠️ This page may combine multiple inventors who share the name “SCHWAB BRENT”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
FSI INT INC
4 patentsUS6221168B1Apr 24, 2001
HF/IPA based process for removing undesired oxides form a substrate
FSI INT INC43 citations90
US6465374B1Oct 15, 2002
Method of surface preparation
FSI INT INC18 citations82
US6663792B2Dec 16, 2003
Equipment for UV wafer heating and photochemistry
FSI INT INC6 citations72
US6287413B1Sep 11, 2001
Apparatus for processing both sides of a microelectronic device precursor
FSI INT INC1 citations61