P

Inventor

TAKAHASHI SYUICHI

JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKAHASHI SYUICHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

3 patents
USD496008SSep 14, 2004

Exhaust ring for manufacturing semiconductors

TOKYO ELECTRON LTD441 citations98
US11430636B2Aug 30, 2022

Plasma processing apparatus and cleaning method

TOKYO ELECTRON LTD0 citations60
US10497545B2Dec 3, 2019

Plasma processing apparatus and cleaning method

TOKYO ELECTRON LTD1 citations60

YOSHIOKA KEN

2 patents
US8252132B2Aug 28, 2012

Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device

YOSHIOKA KEN9 citations82
US9017786B2Apr 28, 2015

Method and apparatus for repairing an electrostatic chuck device, and the electrostatic chuck device

YOSHIOKA KEN1 citations50

TOHOKU ELECTRIC POWER CO

1 patent
US6523352B1Feb 25, 2003

Piping support of gas turbine steam cooled combustor

TOHOKU ELECTRIC POWER CO40 citations91

TAKAHASHI SYUICHI

1 patent
US8142609B2Mar 27, 2012

Plasma processing apparatus

TAKAHASHI SYUICHI3 citations53