Inventor
ARENA CHANTAL J
US9 patents
⚠️ This page may combine multiple inventors who share the name “ARENA CHANTAL J”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASM INC
7 patentsUS6998305B2Feb 14, 2006
Enhanced selectivity for epitaxial deposition
ASM INC68 citations96
US7238595B2Jul 3, 2007
Epitaxial semiconductor deposition methods and structures
ASM INC47 citations95
US7682947B2Mar 23, 2010
Epitaxial semiconductor deposition methods and structures
ASM INC21 citations92
US7402504B2Jul 22, 2008
Epitaxial semiconductor deposition methods and structures
ASM INC21 citations92
US7115521B2Oct 3, 2006
Epitaxial semiconductor deposition methods and structures
ASM INC20 citations92
US7022593B2Apr 4, 2006
SiGe rectification process
ASM INC29 citations91
US7396415B2Jul 8, 2008
Apparatus and methods for isolating chemical vapor reactions at a substrate surface
ASM INC12 citations77