Inventor
VAN LEEUWEN ROBBERT EDGAR
NL14 patents
⚠️ This page may combine multiple inventors who share the name “VAN LEEUWEN ROBBERT EDGAR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
9 patentsUS7385675B2Jun 10, 2008
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV18 citations92
US7576834B2Aug 18, 2009
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV7 citations73
US8675175B2Mar 18, 2014
Lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV1 citations62
US11999645B2Jun 4, 2024
Optical fibers and production methods therefor
ASML NETHERLANDS BV1 citations60
US10338483B2Jul 2, 2019
Actuator system and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US10331045B2Jun 25, 2019
Position measurement system and lithographic apparatus
ASML NETHERLANDS BV0 citations51
US9915880B2Mar 13, 2018
Stage apparatus, lithographic apparatus and method of positioning an object table
ASML NETHERLANDS BV0 citations51
US7280228B2Oct 9, 2007
System and method of measurement, system and method of alignment, lithographic apparatus and method
ASML NETHERLANDS BV0 citations47
US10289011B2May 14, 2019
Position measurement system, interferometer and lithographic apparatus
ASML NETHERLANDS BV0 citations41