Inventor
MAZNEV ALEXEI
US6 patents
⚠️ This page may combine multiple inventors who share the name “MAZNEV ALEXEI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ADVANCED METROLOGY SYSTEMS LLC
4 patentsUS7327468B2Feb 5, 2008
Opto-acoustic apparatus with optical heterodyning for measuring solid surfaces and thin films
ADVANCED METROLOGY SYSTEMS LLC17 citations78
US7365864B2Apr 29, 2008
Method of determining properties of patterned thin film metal structures using transient thermal response
ADVANCED METROLOGY SYSTEMS LLC2 citations59
US7499183B2Mar 3, 2009
Method of measuring sub-micron trench structures
ADVANCED METROLOGY SYSTEMS LLC3 citations58
US7839509B2Nov 23, 2010
Method of measuring deep trenches with model-based optical spectroscopy
ADVANCED METROLOGY SYSTEMS LLC0 citations36