Inventor

PREIL MOSHE

US4 patents

⚠️ This page may combine multiple inventors who share the name “PREIL MOSHE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US7804994B2Sep 28, 2010

Overlay metrology and control method

KLA TENCOR TECH CORP54 citations92

US7557921B1Jul 7, 2009

Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools

KLA TENCOR TECH CORP55 citations92

KLA TENCOR CORP

1 patent

US10262408B2Apr 16, 2019

System, method and computer program product for systematic and stochastic characterization of pattern defects identified from a semiconductor wafer

KLA TENCOR CORP4 citations69

GLOBALFOUNDRIES INC

1 patent

US9530662B2Dec 27, 2016

Methods for fabricating integrated circuits using directed self-assembly including a substantially periodic array of topographical features that includes etch resistant topographical features for transferability control

GLOBALFOUNDRIES INC0 citations40