Inventor
MONAHAN KEVIN
US3 patents
⚠️ This page may combine multiple inventors who share the name “MONAHAN KEVIN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR TECH CORP
2 patentsUS7557921B1Jul 7, 2009
Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools
KLA TENCOR TECH CORP55 citations92
US7678516B2Mar 16, 2010
Test structures and methods for monitoring or controlling a semiconductor fabrication process
KLA TENCOR TECH CORP12 citations79