Inventor

TSAI BEN

US3 patents

⚠️ This page may combine multiple inventors who share the name “TSAI BEN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

KLA TENCOR TECH CORP

2 patents

US7009704B1Mar 7, 2006

Overlay error detection

KLA TENCOR TECH CORP46 citations95

US7557921B1Jul 7, 2009

Apparatus and methods for optically monitoring the fidelity of patterns produced by photolitographic tools

KLA TENCOR TECH CORP55 citations92

KLA TENCOR CORP

1 patent

US7375810B2May 20, 2008

Overlay error detection

KLA TENCOR CORP21 citations92