Inventor

PARTHIER LUTZ

DE20 patents

⚠️ This page may combine multiple inventors who share the name “PARTHIER LUTZ”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

PARTHIER LUTZ

SCHOTT AG

Method for making optical elements for microlithography, the lens systems obtained by the method and their uses

Large-volume CaF2 single crystals with reduced scattering and improved laser stability, and uses thereof

Method and apparatus for making a highly uniform low-stress single crystal by drawing from a melt and uses of said crystal

Structured plate-like glass element and process for the production thereof

Structured plate-like glass element and process for the production thereof

Structured plate-like glass element and process for the production thereof

Method and apparatus for making a highly uniform low-stress single crystal by drawing from a melt and uses of said crystal

Method for making large-volume CaF2 single cystals with reduced scattering and improved laser stability, the crystals made by the method and uses thereof

Method and apparatus for purification of crystal material and for making crystals therefrom and use of crystals obtained thereby

Method for making low-stress large-volume not-(111)-oriented crystals with reduced stress birefringence and more uniform refractive index and crystals made thereby

Method of testing optical materials by irradiating with high energy density radiation, optical materials selected by said method and uses thereof

Method for determination of irreversible radiation damage of optical materials

Method of determining laser stabilities of optical materials, crystals selected according to said method, and uses of said selected crystals

Method and apparatus for measuring the position of a phase interface during crystal growth

HELLMA MATERIALS GMBH & CO KG

Method of making large-volume CaF2 single crystals for optical elements with an optic axis parallel to the (100)-or (110)-crystal axis and CaF2 single crystal made thereby

Process for preparing CaF2 lens blanks especially for 193 nm and 157 nm lithography with minimized deffects

Arrangement and method for preventing the depolarization of linear-polarized light during the transmission of light through crystals

Method for making low-stress large-volume crystals with reduced stress birefringence and more uniform refractive index and crystals made thereby

SCHOTT GLAS

Methods for growing large-volume single crystals from calcium fluoride and their uses

VON SALDERN JOHANN-CHRISTOPH

Scintillation materials of low oxygen content and process for producing same