Inventor
LIN QUN YING
SG8 patents
⚠️ This page may combine multiple inventors who share the name “LIN QUN YING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
CHARTERED SEMICONDUCTOR MFG
5 patentsUS7014962B2Mar 21, 2006
Half tone alternating phase shift masks
CHARTERED SEMICONDUCTOR MFG13 citations82
US6451706B1Sep 17, 2002
Attenuation of reflecting lights by surface treatment
CHARTERED SEMICONDUCTOR MFG2 citations62
US7288366B2Oct 30, 2007
Method for dual damascene patterning with single exposure using tri-tone phase shift mask
CHARTERED SEMICONDUCTOR MFG2 citations60
US7655388B2Feb 2, 2010
Mask and method to pattern chromeless phase lithography contact hole
CHARTERED SEMICONDUCTOR MFG4 citations58
US7866224B2Jan 11, 2011
Monitoring structure
CHARTERED SEMICONDUCTOR MFG0 citations48