P

Inventor

CHONG HUEY MING

SG8 patents
⚠️ This page may combine multiple inventors who share the name “CHONG HUEY MING”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

CHARTERED SEMICONDUCTOR MFG

4 patents
US7224060B2May 29, 2007

Integrated circuit with protective moat

CHARTERED SEMICONDUCTOR MFG25 citations89
US7014962B2Mar 21, 2006

Half tone alternating phase shift masks

CHARTERED SEMICONDUCTOR MFG13 citations82
US7556891B2Jul 7, 2009

Method and apparatus for contact hole unit cell formation

CHARTERED SEMICONDUCTOR MFG5 citations61
US7288366B2Oct 30, 2007

Method for dual damascene patterning with single exposure using tri-tone phase shift mask

CHARTERED SEMICONDUCTOR MFG2 citations60

GLOBALFOUNDRIES SG PTE LTD

2 patents
US8692380B2Apr 8, 2014

Integrated circuit system with sub-geometry removal and method of manufacture thereof

GLOBALFOUNDRIES SG PTE LTD3 citations59
US8048588B2Nov 1, 2011

Method and apparatus for removing radiation side lobes

GLOBALFOUNDRIES SG PTE LTD0 citations51

TAN SOON YOENG

1 patent
US8293546B2Oct 23, 2012

Integrated circuit system with sub-geometry removal and method of manufacture thereof

TAN SOON YOENG2 citations58

TAN SIA KIM

1 patent
US8057968B2Nov 15, 2011

Mask and method to pattern chromeless phase lithography contact hole

TAN SIA KIM2 citations58