Inventor
HIROSHIMA MASAHITO
JP9 patents
⚠️ This page may combine multiple inventors who share the name “HIROSHIMA MASAHITO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ELPIDA MEMORY INC
5 patentsUS7922960B2Apr 12, 2011
Fine resist pattern forming method and nanoimprint mold structure
ELPIDA MEMORY INC9 citations82
US7714308B2May 11, 2010
Variable shaped electron beam lithography system and method for manufacturing substrate
ELPIDA MEMORY INC13 citations82
US7208788B2Apr 24, 2007
Semiconductor device and manufacturing method thereof
ELPIDA MEMORY INC9 citations73
US7438998B2Oct 21, 2008
Method of manufacturing semiconductor device
ELPIDA MEMORY INC5 citations60
US7776495B2Aug 17, 2010
Semiconductor device and manufacturing method thereof
ELPIDA MEMORY INC0 citations51
HIROSHIMA MASAHITO
2 patentsUS8124303B2Feb 28, 2012
Phase shift mask and method for manufacturing the same, and method for manufacturing integrated circuit
HIROSHIMA MASAHITO3 citations58
US8090188B2Jan 3, 2012
Apparatus including defect correcting system which repeats a correcting of a reticle pattern defect and a correcting method using the apparatus
HIROSHIMA MASAHITO2 citations58