Inventor
OJA AARNE
FI16 patents
⚠️ This page may combine multiple inventors who share the name “OJA AARNE”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KYOCERA TECH OY
5 patentsUS12212300B2Jan 28, 2025
MEMS resonator with high quality factor and its use
KYOCERA TECH OY0 citations58
US12328110B2Jun 10, 2025
Microelectromechanical system resonator assembly
KYOCERA TECH OY0 citations55
US12323131B2Jun 3, 2025
Spring-mass microelectromechanical resonator
KYOCERA TECH OY0 citations55
US12574002B2Mar 10, 2026
MEMS resonator
KYOCERA TECH OY0 citations54
US12132467B2Oct 29, 2024
MEMS resonator array arrangement
KYOCERA TECH OY0 citations50
VALTION TEKNILLINEN
3 patentsUS6657442B1Dec 2, 2003
Micromechanical alternating and direct voltage reference apparatus
VALTION TEKNILLINEN15 citations79
US6513388B1Feb 4, 2003
Micromechanical precision silicon scale
VALTION TEKNILLINEN9 citations71
US6630657B1Oct 7, 2003
Method and system for electrically controlling the spacing between micromechanical electrodes
VALTION TEKNILLINEN4 citations62
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY
3 patentsUS11697586B2Jul 11, 2023
Surface micromechanical element and method for manufacturing the same
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY0 citations58
US10965267B2Mar 30, 2021
Micromechanical resonator and method for trimming micromechanical resonator
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY0 citations57
US10807861B2Oct 20, 2020
Surface micromechanical element and method for manufacturing the same
TEKNOLOGIAN TUTKIMUSKESKUS VTT OY0 citations47