Inventor

YOKOUCHI TAKESHI

JP9 patents

⚠️ This page may combine multiple inventors who share the name “YOKOUCHI TAKESHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

TOKYO ELECTRON LTD

5 patents

US7896967B2Mar 1, 2011

Gas supply system, substrate processing apparatus and gas supply method

TOKYO ELECTRON LTD22 citations90

US7535688B2May 19, 2009

Method for electrically discharging substrate, substrate processing apparatus and program

TOKYO ELECTRON LTD49 citations90

US9732909B2Aug 15, 2017

Gas supply method

TOKYO ELECTRON LTD5 citations78

US7553773B2Jun 30, 2009

Pressure control method and processing device

TOKYO ELECTRON LTD0 citations51

US6908864B2Jun 21, 2005

Pressure control method and processing device

TOKYO ELECTRON LTD1 citations51

KAISE SEIICHI

2 patents

US8475623B2Jul 2, 2013

Substrate processing method, system and program

KAISE SEIICHI5 citations69

US8257601B2Sep 4, 2012

Substrate processing method, system and program

KAISE SEIICHI2 citations59

HAYASAKA SHINICHIRO

1 patent

US8790529B2Jul 29, 2014

Gas supply system, substrate processing apparatus and gas supply method

HAYASAKA SHINICHIRO11 citations77

YOKOUCHI TAKESHI

1 patent

US8190281B2May 29, 2012

Substrate processing apparatus, method for examining substrate processing conditions, and storage medium

YOKOUCHI TAKESHI9 citations76