Inventor

SHIDA HIROTAKA

JP10 patents

⚠️ This page may combine multiple inventors who share the name “SHIDA HIROTAKA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

JSR CORP

3 patents

US7560384B2Jul 14, 2009

Chemical mechanical polishing method

JSR CORP20 citations92

US6726997B2Apr 27, 2004

Aqueous dispersion and coated product

JSR CORP16 citations82

US7378349B2May 27, 2008

Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method

JSR CORP2 citations61

SHIDA HIROTAKA

3 patents

US8506359B2Aug 13, 2013

Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method

SHIDA HIROTAKA5 citations66

US8119517B2Feb 21, 2012

Chemical mechanical polishing method and method of manufacturing semiconductor device

SHIDA HIROTAKA3 citations60

US8480920B2Jul 9, 2013

Chemical mechanical polishing aqueous dispersion, method of preparing the same, chemical mechanical polishing aqueous dispersion preparation kit, and chemical mechanical polishing method

SHIDA HIROTAKA4 citations59

ABE TAICHI

1 patent

US8492276B2Jul 23, 2013

Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method

ABE TAICHI8 citations76

NAMIE YUUJI

1 patent

US8574330B2Nov 5, 2013

Chemical mechanical polishing aqueous dispersion and chemical mechanical polishing method for semiconductor device

NAMIE YUUJI5 citations63

KUNITANI EIICHIROU

1 patent

US8470195B2Jun 25, 2013

Chemical mechanical polishing aqueous dispersion preparation set, method of preparing chemical mechanical polishing aqueous dispersion, chemical mechanical polishing aqueous dispersion, and chemical mechanical polishing method

KUNITANI EIICHIROU4 citations56

MORI YASUMASA

1 patent

US8257504B2Sep 4, 2012

Surface treatment composition, surface treatment method, and method for manufacturing semiconductor device

MORI YASUMASA0 citations43