Inventor
TAKEMURA AKIHIRO
JP7 patents
⚠️ This page may combine multiple inventors who share the name “TAKEMURA AKIHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SHIDA HIROTAKA
2 patentsUS8506359B2Aug 13, 2013
Aqueous dispersion for chemical mechanical polishing and chemical mechanical polishing method
SHIDA HIROTAKA5 citations66
US8480920B2Jul 9, 2013
Chemical mechanical polishing aqueous dispersion, method of preparing the same, chemical mechanical polishing aqueous dispersion preparation kit, and chemical mechanical polishing method
SHIDA HIROTAKA4 citations59