Inventor
MCCLATCHIE SIMON
US6 patents
⚠️ This page may combine multiple inventors who share the name “MCCLATCHIE SIMON”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
4 patentsUS7129167B1Oct 31, 2006
Methods and systems for a stress-free cleaning a surface of a substrate
LAM RES CORP10 citations73
US6988934B1Jan 24, 2006
Method and apparatus of a variable height and controlled fluid flow platen in a chemical mechanical polishing system
LAM RES CORP7 citations72
US7040954B1May 9, 2006
Methods of and apparatus for controlling polishing surface characteristics for chemical mechanical polishing
LAM RES CORP6 citations62
US7040970B2May 9, 2006
Apparatus and method for distributing a polishing fluid
LAM RES CORP1 citations48