Inventor
CUCCHETTI ANTONELLA
US15 patents
⚠️ This page may combine multiple inventors who share the name “CUCCHETTI ANTONELLA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
VARIAN SEMICONDUCTOR EQUIPMENT
5 patentsUS6403972B1Jun 11, 2002
Methods and apparatus for alignment of ion beam systems using beam current sensors
VARIAN SEMICONDUCTOR EQUIPMENT20 citations87
US7547460B2Jun 16, 2009
Ion implanter optimizer scan waveform retention and recovery
VARIAN SEMICONDUCTOR EQUIPMENT10 citations79
US7442944B2Oct 28, 2008
Ion beam implant current, spot width and position tuning
VARIAN SEMICONDUCTOR EQUIPMENT9 citations79
US7402820B2Jul 22, 2008
Ion beam contamination determination
VARIAN SEMICONDUCTOR EQUIPMENT3 citations58
US7820988B2Oct 26, 2010
Implant uniformity control
VARIAN SEMICONDUCTOR EQUIPMENT0 citations52
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC
5 patentsUS9978554B1May 22, 2018
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC9 citations82
US10446372B2Oct 15, 2019
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC2 citations71
US11114277B2Sep 7, 2021
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations61
US11049691B2Jun 29, 2021
Ion beam quality control using a movable mass resolving device
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC1 citations61
US10741361B2Aug 11, 2020
Dual cathode ion source
VARIAN SEMICONDUCTOR EQUIPMENT ASS INC0 citations50
APPLIED MATERIALS INC
3 patentsUS11437215B2Sep 6, 2022
Electrostatic filter providing reduced particle generation
APPLIED MATERIALS INC0 citations62
US11011343B2May 18, 2021
High-current ion implanter and method for controlling ion beam using high-current ion implanter
APPLIED MATERIALS INC0 citations62
US11810754B2Nov 7, 2023
System using pixelated faraday sensor
APPLIED MATERIALS INC0 citations56