Inventor
SPORLEDER DAVID
US6 patents
⚠️ This page may combine multiple inventors who share the name “SPORLEDER DAVID”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
AXCELIS TECH INC
5 patentsUS12497687B2Dec 16, 2025
Ion implantation system and method for implanting aluminum using non-fluorine-containing halide species or molecules
AXCELIS TECH INC0 citations59
US12154763B2Nov 26, 2024
Hydraulic feed system for an ion source
AXCELIS TECH INC0 citations57
US11728140B1Aug 15, 2023
Hydraulic feed system for an ion source
AXCELIS TECH INC0 citations57
US11545330B2Jan 3, 2023
Ion source with multiple bias electrodes
AXCELIS TECH INC0 citations49
US11756772B2Sep 12, 2023
System and method for extending a lifetime of an ion source for molecular carbon implants
AXCELIS TECH INC0 citations48