Inventor
BROERS SANDER CHRISTIAAN
NL6 patents
⚠️ This page may combine multiple inventors who share the name “BROERS SANDER CHRISTIAAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ASML NETHERLANDS BV
4 patentsUS9921494B2Mar 20, 2018
Lithographic apparatus comprising an actuator, and method for protecting such actuator
ASML NETHERLANDS BV0 citations50
US9389518B2Jul 12, 2016
Stage system and a lithographic apparatus
ASML NETHERLANDS BV1 citations47
US9910367B2Mar 6, 2018
Lithographic apparatus, method for positioning an object in a lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations46
US10061213B2Aug 28, 2018
Sensor, object positioning system, lithographic apparatus and device manufacturing method
ASML NETHERLANDS BV0 citations36