Inventor
IWAI Kazutoshi
JP12 patents
⚠️ This page may combine multiple inventors who share the name “IWAI Kazutoshi”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
11 patentsUS10731256B2Aug 4, 2020
Plating apparatus, plating method, and recording medium
TOKYO ELECTRON LTD2 citations72
US11004684B2May 11, 2021
Forming method of hard mask
TOKYO ELECTRON LTD0 citations62
US11519074B2Dec 6, 2022
Plating method and recording medium
TOKYO ELECTRON LTD0 citations61
US11230767B2Jan 25, 2022
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US11028483B2Jun 8, 2021
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US10784111B2Sep 22, 2020
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US10224202B2Mar 5, 2019
Forming method of hard mask, forming apparatus of hard mask and recording medium
TOKYO ELECTRON LTD0 citations51
US9966306B2May 8, 2018
Catalyst layer forming method, catalyst layer forming system and recording medium
TOKYO ELECTRON LTD1 citations51
US9650717B2May 16, 2017
Pre-treatment method of plating, storage medium, and plating system
TOKYO ELECTRON LTD0 citations51
US9523153B2Dec 20, 2016
Pre-treatment method for plating and storage medium
TOKYO ELECTRON LTD0 citations51
US10755973B2Aug 25, 2020
Metal wiring layer forming method, metal wiring layer forming apparatus and recording medium
TOKYO ELECTRON LTD0 citations49