Inventor
INATOMI YUICHIRO
JP38 patents
⚠️ This page may combine multiple inventors who share the name “INATOMI YUICHIRO”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
30 patentsUS7875420B2Jan 25, 2011
Method for improving surface roughness of processed film of substrate and apparatus for processing substrate
TOKYO ELECTRON LTD11 citations84
US7819076B2Oct 26, 2010
Substrate treatment method and substrate treatment apparatus
TOKYO ELECTRON LTD9 citations84
US7989156B2Aug 2, 2011
Substrate treatment method and substrate treatment apparatus
TOKYO ELECTRON LTD5 citations73
US10731256B2Aug 4, 2020
Plating apparatus, plating method, and recording medium
TOKYO ELECTRON LTD2 citations72
US12564868B2Mar 3, 2026
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations62
US11004684B2May 11, 2021
Forming method of hard mask
TOKYO ELECTRON LTD0 citations62
US11795546B2Oct 24, 2023
Substrate liquid processing apparatus, substrate liquid processing method and recording medium
TOKYO ELECTRON LTD0 citations61
US11519074B2Dec 6, 2022
Plating method and recording medium
TOKYO ELECTRON LTD0 citations61
US8343714B2Jan 1, 2013
Resist applying and developing method, resist film processing unit, and resist applying and developing apparatus comprising the unit
TOKYO ELECTRON LTD2 citations61
US7714979B2May 11, 2010
Substrate processing apparatus
TOKYO ELECTRON LTD3 citations61
US12404587B2Sep 2, 2025
Substrate processing apparatus and substrate processing method
TOKYO ELECTRON LTD0 citations60
US9847239B2Dec 19, 2017
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations52
US9761485B2Sep 12, 2017
Catalyst layer forming method, catalyst layer forming system, and recording medium
TOKYO ELECTRON LTD0 citations52
US9552994B2Jan 24, 2017
Plating apparatus, plating method, and storage medium
TOKYO ELECTRON LTD0 citations52
US9016231B2Apr 28, 2015
Substrate processing method and substrate processing system
TOKYO ELECTRON LTD0 citations52
US8848161B2Sep 30, 2014
Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method
TOKYO ELECTRON LTD0 citations52
US11230767B2Jan 25, 2022
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US11028483B2Jun 8, 2021
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US10784111B2Sep 22, 2020
Plating method, plating apparatus and recording medium
TOKYO ELECTRON LTD0 citations51
US10354915B2Jul 16, 2019
Adhesion layer forming method, adhesion layer forming system and recording medium
TOKYO ELECTRON LTD0 citations51
US10224202B2Mar 5, 2019
Forming method of hard mask, forming apparatus of hard mask and recording medium
TOKYO ELECTRON LTD0 citations51
US9966306B2May 8, 2018
Catalyst layer forming method, catalyst layer forming system and recording medium
TOKYO ELECTRON LTD1 citations51
US9523153B2Dec 20, 2016
Pre-treatment method for plating and storage medium
TOKYO ELECTRON LTD0 citations51
US7600933B2Oct 13, 2009
Substrate processing apparatus
TOKYO ELECTRON LTD1 citations51
US12281390B2Apr 22, 2025
Substrate liquid processing apparatus for supplying temperature-controlled plating liquid
TOKYO ELECTRON LTD0 citations43
US9922835B2Mar 20, 2018
Plating method, plating apparatus, and storage medium
TOKYO ELECTRON LTD0 citations42
US9487865B2Nov 8, 2016
Plating apparatus, plating method and storage medium
TOKYO ELECTRON LTD0 citations42
US10179950B2Jan 15, 2019
Plating method, plated component, and plating system
TOKYO ELECTRON LTD0 citations41
US10030308B2Jul 24, 2018
Plating method, plating system and storage medium
TOKYO ELECTRON LTD0 citations41
US9837308B2Dec 5, 2017
Plating method, plating system and storage medium
TOKYO ELECTRON LTD0 citations41
INATOMI YUICHIRO
8 patentsUS8420304B2Apr 16, 2013
Resist coating and developing apparatus, resist coating and developing method, resist-film processing apparatus, and resist-film processing method
INATOMI YUICHIRO19 citations92
US9505019B2Nov 29, 2016
Plating apparatus, plating method and storage medium
INATOMI YUICHIRO3 citations72
US8691497B2Apr 8, 2014
Developing treatment method
INATOMI YUICHIRO3 citations62
US8411246B2Apr 2, 2013
Resist coating and developing apparatus and method
INATOMI YUICHIRO2 citations62
US8728247B2May 20, 2014
Substrate processing method, storage medium storing program for executing substrate processing method and substrate processing apparatus
INATOMI YUICHIRO0 citations51
US8646403B2Feb 11, 2014
Method for improving surface roughness of processed film of substrate and apparatus for processing substrate
INATOMI YUICHIRO0 citations51
US8563230B2Oct 22, 2013
Substrate processing method and substrate processing system
INATOMI YUICHIRO1 citations51
US9777379B2Oct 3, 2017
Plating apparatus, plating method and storage medium
INATOMI YUICHIRO0 citations41