Inventor
SMITH JR PAUL H
US14 patents
⚠️ This page may combine multiple inventors who share the name “SMITH JR PAUL H”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
IBM
8 patentsUS6334807B1Jan 1, 2002
Chemical mechanical polishing in-situ end point system
IBM113 citations97
US6319093B1Nov 20, 2001
Chemical-mechanical polishing system and method for integrated spin dry-film thickness measurement
IBM32 citations92
US6340601B1Jan 22, 2002
Method for reworking copper metallurgy in semiconductor devices
IBM26 citations87
US5885135AMar 23, 1999
CMP wafer carrier for preferential polishing of a wafer
IBM32 citations87
US6579149B2Jun 17, 2003
Support and alignment device for enabling chemical mechanical polishing rinse and film measurements
IBM13 citations83
US6458020B1Oct 1, 2002
Slurry recirculation in chemical mechanical polishing
IBM15 citations78
US6967715B2Nov 22, 2005
Method and apparatus for optical film measurements in a controlled environment
IBM10 citations71
US7130038B2Oct 31, 2006
Method and apparatus for optical film measurements in a controlled environment
IBM1 citations49
SMITH JR PAUL H
6 patentsUS8651268B2Feb 18, 2014
Hydrogen energy systems
SMITH JR PAUL H11 citations82
US9123925B2Sep 1, 2015
Hydrogen energy systems
SMITH JR PAUL H3 citations60
US9739421B2Aug 22, 2017
Hydrogen energy systems
SMITH JR PAUL H0 citations50
US9732906B2Aug 15, 2017
Hydrogen energy systems
SMITH JR PAUL H0 citations50
US9739422B2Aug 22, 2017
Hydrogen energy systems
SMITH JR PAUL H0 citations39
US8651270B2Feb 18, 2014
Hydrogen energy systems
SMITH JR PAUL H0 citations39