Inventor
ZHANG CERINA
US6 patents
Patents
6 patentsUS9452925B2Sep 27, 2016
Method of increasing MEMS enclosure pressure using outgassing material
INVENSENSE INC8 citations83
US9731963B2Aug 15, 2017
Method of increasing MEMS enclosure pressure using outgassing material
INVENSENSE INC2 citations72
US9650241B2May 16, 2017
Method for providing a MEMS device with a plurality of sealed enclosures having uneven standoff structures and MEMS device thereof
INVENSENSE INC4 citations71
US9926192B2Mar 27, 2018
Methods for stiction reduction in MEMS sensors
INVENSENSE INC2 citations70
US9136165B2Sep 15, 2015
Methods for stiction reduction in MEMS sensors
INVENSENSE INC2 citations60
US9738511B2Aug 22, 2017
Reduction of chipping damage to MEMS structure
INVENSENSE INC0 citations45