Inventor
BRUGGER MICHAEL
AT18 patents
⚠️ This page may combine multiple inventors who share the name “BRUGGER MICHAEL”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES AG
8 patentsUS9245777B2Jan 26, 2016
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
LAM RES AG11 citations80
US9093482B2Jul 28, 2015
Method and apparatus for liquid treatment of wafer shaped articles
LAM RES AG6 citations71
US9536770B2Jan 3, 2017
Method and apparatus for liquid treatment of wafer shaped articles
LAM RES AG2 citations63
US8029641B2Oct 4, 2011
Device and method for liquid treatment of wafer-shaped articles
LAM RES AG3 citations50
US9685358B2Jun 20, 2017
Apparatus for liquid treatment of wafer shaped articles and heating system for use in such apparatus
LAM RES AG0 citations48
US9972514B2May 15, 2018
Apparatus for liquid treatment of wafer shaped articles
LAM RES AG1 citations47
US12538752B2Jan 27, 2026
Apparatus for processing a wafer-shaped article
LAM RES AG0 citations43
US9887120B2Feb 6, 2018
Apparatus for treating surfaces of wafer-shaped articles
LAM RES AG0 citations40
BRUGGER MICHAEL
5 patentsUS9190310B2Nov 17, 2015
Grounded chuck
BRUGGER MICHAEL10 citations81
US8608146B2Dec 17, 2013
Reinforced pin for being used in a pin chuck, and a pin chuck using such reinforced pin
BRUGGER MICHAEL14 citations79
US8231939B2Jul 31, 2012
Device and method for wet treating plate-like-articles
BRUGGER MICHAEL4 citations57
US8613288B2Dec 24, 2013
High temperature chuck and method of using same
BRUGGER MICHAEL0 citations49
US8936832B2Jan 20, 2015
Device and method for wet treating plate-like-articles
BRUGGER MICHAEL1 citations47