Inventor
KAMENOV VLADIMIR
DE18 patents
⚠️ This page may combine multiple inventors who share the name “KAMENOV VLADIMIR”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
7 patentsUS10042146B2Aug 7, 2018
Catadioptric projection objective
ZEISS CARL SMT GMBH0 citations52
US9726870B2Aug 8, 2017
Catadioptric projection objective
ZEISS CARL SMT GMBH0 citations52
US9279969B2Mar 8, 2016
Catadioptric projection objective
ZEISS CARL SMT GMBH0 citations52
US8873137B2Oct 28, 2014
Catadioptric projection objective
ZEISS CARL SMT GMBH0 citations52
US10281824B2May 7, 2019
Microlithography projection objective
ZEISS CARL SMT GMBH0 citations51
US9097984B2Aug 4, 2015
Microlithography projection objective
ZEISS CARL SMT GMBH1 citations51
US9921483B2Mar 20, 2018
Surface correction of mirrors with decoupling coating
ZEISS CARL SMT GMBH1 citations46
ZEISS CARL SMT AG
5 patentsUS7239450B2Jul 3, 2007
Method of determining lens materials for a projection exposure apparatus
ZEISS CARL SMT AG16 citations84
US7808615B2Oct 5, 2010
Projection exposure apparatus and method for operating the same
ZEISS CARL SMT AG2 citations62
US7321465B2Jan 22, 2008
Method of optimizing an objective with fluoride crystal lenses, and objective with fluoride crystal lenses
ZEISS CARL SMT AG5 citations62
US7456933B2Nov 25, 2008
Method for improving the imaging properties of a projection objective for a microlithographic projection exposure apparatus
ZEISS CARL SMT AG3 citations61
US7355791B2Apr 8, 2008
Optical system and photolithography tool comprising same
ZEISS CARL SMT AG0 citations51