Inventor
KORB THOMAS
DE32 patents
⚠️ This page may combine multiple inventors who share the name “KORB THOMAS”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
ZEISS CARL SMT GMBH
28 patentsUS10042248B2Aug 7, 2018
Illumination optical unit for a mask inspection system and mask inspection system with such an illumination optical unit
ZEISS CARL SMT GMBH22 citations89
US10901391B1Jan 26, 2021
Multi-scanning electron microscopy for wafer alignment
ZEISS CARL SMT GMBH10 citations79
US10444631B2Oct 15, 2019
Method of operating a microlithographic projection apparatus and illumination system of such an apparatus
ZEISS CARL SMT GMBH2 citations72
US9910360B2Mar 6, 2018
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH2 citations72
US9500954B2Nov 22, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH3 citations71
US12175650B2Dec 24, 2024
Processing image data sets
ZEISS CARL SMT GMBH2 citations69
US8786849B2Jul 22, 2014
Method for measuring an optical system
ZEISS CARL SMT GMBH2 citations61
US12293895B2May 6, 2025
Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
ZEISS CARL SMT GMBH0 citations60
US12288706B2Apr 29, 2025
Parameterizing x-ray scattering measurement using slice-and-image tomographic imaging of semiconductor structures
ZEISS CARL SMT GMBH0 citations60
US11810749B2Nov 7, 2023
Charged particle beam system, method of operating a charged particle beam system, method of recording a plurality of images and computer programs for executing the methods
ZEISS CARL SMT GMBH0 citations60
US12148139B2Nov 19, 2024
Methods and evaluation devices for analyzing three-dimensional data sets representing devices
ZEISS CARL SMT GMBH0 citations59
US12056865B2Aug 6, 2024
Wafer-tilt determination for slice-and-image process
ZEISS CARL SMT GMBH0 citations59
US11848172B2Dec 19, 2023
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations59
US12283504B2Apr 22, 2025
Contact area size determination between 3D structures in an integrated semiconductor sample
ZEISS CARL SMT GMBH0 citations58
US11915908B2Feb 27, 2024
Method for measuring a sample and microscope implementing the method
ZEISS CARL SMT GMBH0 citations58
US11436506B2Sep 6, 2022
Method and devices for determining metrology sites
ZEISS CARL SMT GMBH0 citations58
US10061203B2Aug 28, 2018
Beam distributing optical device and associated unit, system and apparatus
ZEISS CARL SMT GMBH0 citations52
US10012907B2Jul 3, 2018
Optical system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations52
US10274828B2Apr 30, 2019
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH0 citations51
US9946161B2Apr 17, 2018
Optical system for a microlithographic projection exposure apparatus and microlithographic exposure method
ZEISS CARL SMT GMBH1 citations51
US9910359B2Mar 6, 2018
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH0 citations50
US9310690B2Apr 12, 2016
Illumination system of a microlithographic projection exposure apparatus
ZEISS CARL SMT GMBH1 citations50
US12557588B2Feb 17, 2026
Methods of cross-section imaging of an inspection volume in a wafer
ZEISS CARL SMT GMBH0 citations49
US11728130B2Aug 15, 2023
Method of recording an image using a particle microscope
ZEISS CARL SMT GMBH0 citations48
US12288705B2Apr 29, 2025
FIB-SEM 3D tomography for measuring shape deviations of HAR structures
ZEISS CARL SMT GMBH0 citations47
US12045969B2Jul 23, 2024
Automated root cause analysis for defect detection during fabrication processes of semiconductor structures
ZEISS CARL SMT GMBH0 citations47
US10539883B2Jan 21, 2020
Illumination system of a microlithographic projection device and method for operating such a system
ZEISS CARL SMT GMBH0 citations41
US9977334B2May 22, 2018
Lighting system of a microlithographic projection exposure system and method for operating such a lighting system
ZEISS CARL SMT GMBH0 citations41