Inventor

ZAFAR KHURRAM

US10 patents

⚠️ This page may combine multiple inventors who share the name “ZAFAR KHURRAM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.

ANCHOR SEMICONDUCTOR INC

5 patents

US10997340B2May 4, 2021

Pattern centric process control

ANCHOR SEMICONDUCTOR INC5 citations82

US10546085B2Jan 28, 2020

Pattern centric process control

ANCHOR SEMICONDUCTOR INC7 citations82

US9846934B2Dec 19, 2017

Pattern weakness and strength detection and tracking during a semiconductor device fabrication process

ANCHOR SEMICONDUCTOR INC10 citations81

US11694009B2Jul 4, 2023

Pattern centric process control

ANCHOR SEMICONDUCTOR INC0 citations60

US10062160B2Aug 28, 2018

Pattern weakness and strength detection and tracking during a semiconductor device fabrication process

ANCHOR SEMICONDUCTOR INC1 citations49

KLA TENCOR TECH CORP

1 patent

US7570796B2Aug 4, 2009

Methods and systems for utilizing design data in combination with inspection data

KLA TENCOR TECH CORP286 citations98

KLA-TENCOR TECH CORP

1 patent

US9401014B2Jul 26, 2016

Methods and systems for utilizing design data in combination with inspection data

KLA-TENCOR TECH CORP22 citations92

ZAFAR KHURRAM

1 patent

US8923600B2Dec 30, 2014

Methods and systems for utilizing design data in combination with inspection data

ZAFAR KHURRAM33 citations90

CHANG ELLIS

1 patent

US9087367B2Jul 21, 2015

Determining design coordinates for wafer defects

CHANG ELLIS11 citations82

GAO LISHENG

1 patent

US8989479B2Mar 24, 2015

Region based virtual fourier filter

GAO LISHENG3 citations54