Inventor

SHIN HYEONG SEOP

KR2 patents

Patents

2 patents

US9978605B2May 22, 2018

Method of forming low resistivity fluorine free tungsten film without nucleation

LAM RES CORP23 citations93

US10546751B2Jan 28, 2020

Forming low resistivity fluorine free tungsten film without nucleation

LAM RES CORP8 citations83