Inventor
BA XIAOLAN
US11 patents
⚠️ This page may combine multiple inventors who share the name “BA XIAOLAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
LAM RES CORP
9 patentsUS9613818B2Apr 4, 2017
Deposition of low fluorine tungsten by sequential CVD process
LAM RES CORP33 citations94
US9978605B2May 22, 2018
Method of forming low resistivity fluorine free tungsten film without nucleation
LAM RES CORP23 citations93
US10546751B2Jan 28, 2020
Forming low resistivity fluorine free tungsten film without nucleation
LAM RES CORP8 citations83
US9754824B2Sep 5, 2017
Tungsten films having low fluorine content
LAM RES CORP15 citations83
US12014928B2Jun 18, 2024
Multi-layer feature fill
LAM RES CORP2 citations71
US12237221B2Feb 25, 2025
Nucleation-free tungsten deposition
LAM RES CORP0 citations60
US11972952B2Apr 30, 2024
Atomic layer deposition on 3D NAND structures
LAM RES CORP1 citations59
US12077858B2Sep 3, 2024
Tungsten deposition
LAM RES CORP0 citations57
US12060639B2Aug 13, 2024
Rapid flush purging during atomic layer deposition
LAM RES CORP0 citations47