Inventor
JUNG BUYOUNG
KR6 patents
Patents
6 patentsUS11794219B2Oct 24, 2023
Liquid supply unit and substrate treating apparatus and method
SEMES CO LTD2 citations69
US10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US11232942B2Jan 25, 2022
Substrate treating method and substrate treating apparatus
SEMES CO LTD2 citations68
US11658048B2May 23, 2023
Unit for supplying liquid, apparatus and method for treating substrate having the unit
SEMES CO LTD1 citations58
US10699918B2Jun 30, 2020
Chemical supply unit and apparatus for treating a substrate
SEMES CO LTD1 citations58
US11869778B2Jan 9, 2024
Liquid supply unit, and apparatus and method for processing substrate
SEMES CO LTD0 citations46