Inventor
YU JIN TACK
KR5 patents
Patents
5 patentsUS10758875B2Sep 1, 2020
Liquid supply unit, substrate treating apparatus, and method for removing bubbles
SEMES CO LTD2 citations70
US10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US11361962B2Jun 14, 2022
Method and apparatus for processing substrate
SEMES CO LTD3 citations68
US11511321B2Nov 29, 2022
Substrate processing method and substrate processing apparatus
SEMES CO LTD0 citations58
US10699918B2Jun 30, 2020
Chemical supply unit and apparatus for treating a substrate
SEMES CO LTD1 citations58