Inventor
BANG BYUNGSUN
KR7 patents
Patents
7 patentsUS10758875B2Sep 1, 2020
Liquid supply unit, substrate treating apparatus, and method for removing bubbles
SEMES CO LTD2 citations70
US10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US11765793B2Sep 19, 2023
Substrate treating apparatus
SEMES CO LTD2 citations66
US12278121B2Apr 15, 2025
Support unit, substrate treating apparatus including the same, and substrate treating method
SEMES CO LTD0 citations57
US11000879B2May 11, 2021
Method and apparatus for treating substrate
SEMES CO LTD0 citations57
US11745291B2Sep 5, 2023
Apparatus and method for processing substrate
SEMES CO LTD0 citations46
US10453672B2Oct 22, 2019
Dissolved ozone removal unit, apparatus for treating substrate, method of removing dissolved ozone, and method of cleaning substrate
SEMES CO LTD0 citations39