Inventor
WOO JONGHYEON
KR3 patents
Patents
3 patentsUS10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US11794220B2Oct 24, 2023
Fluid supply unit and substrate treating apparatus having the same
SEMES CO LTD2 citations68
US11721575B2Aug 8, 2023
Substrate support unit and substrate treating apparatus having the same
SEMES CO LTD2 citations68