Inventor
KIM HEEHWAN
KR9 patents
⚠️ This page may combine multiple inventors who share the name “KIM HEEHWAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SEMES CO LTD
6 patentsUS10109506B2Oct 23, 2018
Unit for supplying fluid, apparatus and method for treating substrate with the unit
SEMES CO LTD13 citations82
US10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
SEMES CO LTD2 citations69
US10304687B2May 28, 2019
Substrate treating apparatus and substrate treating method
SEMES CO LTD1 citations61
US11981995B2May 14, 2024
Chemical supply apparatus, method for removing particles from chemical, nozzle unit, and substrate treating apparatus
SEMES CO LTD0 citations59
US11424139B2Aug 23, 2022
Apparatus and method for treating substrate, and nozzle unit
SEMES CO LTD1 citations59
US10707101B2Jul 7, 2020
Substrate treating apparatus and substrate treating method
SEMES CO LTD0 citations39