Inventor
SHIN CHEOL-YONG
KR4 patents
Patents
4 patentsUS10825699B2Nov 3, 2020
Standby port and substrate processing apparatus having the same
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Inkjet apparatus for display panel manufacturing and substrate processing facility
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Supporting structure, apparatus for supporting substrate and facility for processing substrate
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US12525470B2Jan 13, 2026
Nozzle and substrate processing apparatus including the same
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