Inventor
LEVIANT TOM
IL3 patents
⚠️ This page may combine multiple inventors who share the name “LEVIANT TOM”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
2 patentsUS10831108B2Nov 10, 2020
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
KLA CORP5 citations66
US11360397B2Jun 14, 2022
System and method for application of harmonic detectivity as a quality indicator for imaging-based overlay measurements
KLA CORP0 citations40