Inventor
SALTOUN LILACH
IL4 patents
⚠️ This page may combine multiple inventors who share the name “SALTOUN LILACH”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA CORP
3 patentsUS10831108B2Nov 10, 2020
Method of analyzing and utilizing landscapes to reduce or eliminate inaccuracy in overlay optical metrology
KLA CORP5 citations66
US11249400B2Feb 15, 2022
Per-site residuals analysis for accurate metrology measurements
KLA CORP1 citations59
US12080610B2Sep 3, 2024
Wavelet system and method for ameliorating misregistration and asymmetry of semiconductor devices
KLA CORP0 citations58