Inventor
EMOTO TETSUYA
JP11 patents
⚠️ This page may combine multiple inventors who share the name “EMOTO TETSUYA”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
SCREEN HOLDINGS CO LTD
8 patentsUS9455134B2Sep 27, 2016
Substrate processing method
SCREEN HOLDINGS CO LTD3 citations72
US10720320B2Jul 21, 2020
Substrate processing method and substrate processing device
SCREEN HOLDINGS CO LTD2 citations70
US12255061B2Mar 18, 2025
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations60
US10910213B2Feb 2, 2021
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations60
US10843223B2Nov 24, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD1 citations58
US10224198B2Mar 5, 2019
Substrate processing apparatus and substrate processing method
SCREEN HOLDINGS CO LTD0 citations50
US10790166B2Sep 29, 2020
Substrate processing method and substrate processing apparatus
SCREEN HOLDINGS CO LTD0 citations39
US10510528B2Dec 17, 2019
Substrate processing method
SCREEN HOLDINGS CO LTD0 citations39