Inventor
CHEN TSUNG-CHUAN
US8 patents
⚠️ This page may combine multiple inventors who share the name “CHEN TSUNG-CHUAN”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TAIWAN SEMICONDUCTOR MFG
4 patentsUS6764810B2Jul 20, 2004
Method for dual-damascene formation using a via plug
TAIWAN SEMICONDUCTOR MFG150 citations96
US6830877B2Dec 14, 2004
Method for forming via and contact holes with deep UV photoresist
TAIWAN SEMICONDUCTOR MFG11 citations70
US6583062B1Jun 24, 2003
Method of improving an aspect ratio while avoiding etch stop
TAIWAN SEMICONDUCTOR MFG12 citations70
US7306746B2Dec 11, 2007
Critical dimension control in a semiconductor fabrication process
TAIWAN SEMICONDUCTOR MFG6 citations57