Inventor
SAKATA YO
JP4 patents
Patents
4 patentsUS9285672B2Mar 15, 2016
Reflective mask and method for manufacturing same
TOPPAN PRINTING CO LTD8 citations79
US10910425B2Feb 2, 2021
Solid-state image sensor
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US9448468B2Sep 20, 2016
Reflective mask blank and reflective mask, and methods for manufacturing reflective mask blank and reflective mask
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US9442364B2Sep 13, 2016
Mask blank for reflection-type exposure, and mask for reflection-type exposure
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