Inventor
GRUNZWEIG TZAHI
IL11 patents
⚠️ This page may combine multiple inventors who share the name “GRUNZWEIG TZAHI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
KLA TENCOR CORP
9 patentsUS10527952B2Jan 7, 2020
Fault discrimination and calibration of scatterometry overlay targets
KLA TENCOR CORP13 citations81
US9851300B1Dec 26, 2017
Decreasing inaccuracy due to non-periodic effects on scatterometric signals
KLA TENCOR CORP12 citations80
US10209183B2Feb 19, 2019
Scatterometry system and method for generating non-overlapping and non-truncated diffraction images
KLA TENCOR CORP4 citations72
US9719920B2Aug 1, 2017
Scatterometry system and method for generating non-overlapping and non-truncated diffraction images
KLA TENCOR CORP2 citations72
US10365230B1Jul 30, 2019
Scatterometry overlay based on reflection peak locations
KLA TENCOR CORP3 citations71
US9903711B2Feb 27, 2018
Feed forward of metrology data in a metrology system
KLA TENCOR CORP5 citations71
US10761022B2Sep 1, 2020
Rotated boundaries of stops and targets
KLA TENCOR CORP0 citations40
US10565697B2Feb 18, 2020
Utilizing overlay misregistration error estimations in imaging overlay metrology
KLA TENCOR CORP0 citations37
US10379449B2Aug 13, 2019
Identifying process variations during product manufacture
KLA TENCOR CORP0 citations36