Inventor
BERDING KEITH
US10 patents
Patents
10 patentsUS11668602B2Jun 6, 2023
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC2 citations71
US11284018B1Mar 22, 2022
Smart camera substrate
APPLIED MATERIALS INC2 citations69
US12405164B2Sep 2, 2025
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC0 citations60
US12432461B2Sep 30, 2025
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US12114083B2Oct 8, 2024
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11736818B2Aug 22, 2023
Smart camera substrate
APPLIED MATERIALS INC0 citations59
US11927543B2Mar 12, 2024
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US11619594B2Apr 4, 2023
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US12489022B2Dec 2, 2025
In-situ etch rate and etch rate uniformity detection system
APPLIED MATERIALS INC0 citations48
US11830779B2Nov 28, 2023
In-situ etch material selectivity detection system
APPLIED MATERIALS INC0 citations48