Inventor
KUTNEY MICHAEL
US17 patents
Patents
17 patentsUS7780866B2Aug 24, 2010
Method of plasma confinement for enhancing magnetic control of plasma radial distribution
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USD977504SFeb 7, 2023
Portion of a display panel with a graphical user interface
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US7674353B2Mar 9, 2010
Apparatus to confine plasma and to enhance flow conductance
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US12283503B2Apr 22, 2025
Substrate measurement subsystem
APPLIED MATERIALS INC3 citations73
US7618516B2Nov 17, 2009
Method and apparatus to confine plasma and to enhance flow conductance
APPLIED MATERIALS INC6 citations73
US11668602B2Jun 6, 2023
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC2 citations71
US12191176B2Jan 7, 2025
Integrated substrate measurement system to improve manufacturing process performance
APPLIED MATERIALS INC0 citations61
US11688616B2Jun 27, 2023
Integrated substrate measurement system to improve manufacturing process performance
APPLIED MATERIALS INC0 citations61
US12405164B2Sep 2, 2025
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC0 citations60
US12066639B2Aug 20, 2024
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC0 citations59
US11719952B2Aug 8, 2023
Adjustable achromatic collimator assembly for endpoint detection systems
APPLIED MATERIALS INC1 citations59
US11927543B2Mar 12, 2024
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US11619594B2Apr 4, 2023
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US12339645B2Jun 24, 2025
Estimation of chamber component conditions using substrate measurements
APPLIED MATERIALS INC0 citations51
US12216455B2Feb 4, 2025
Chamber component condition estimation using substrate measurements
APPLIED MATERIALS INC0 citations51
US11150120B2Oct 19, 2021
Low temperature thermal flow ratio controller
APPLIED MATERIALS INC0 citations50
US12148647B2Nov 19, 2024
Integrated substrate measurement system
APPLIED MATERIALS INC0 citations46