Inventor
ZHU ZHAOZHAO
US22 patents
Patents
22 patentsUSD977504SFeb 7, 2023
Portion of a display panel with a graphical user interface
APPLIED MATERIALS INC10 citations84
USD1045924SOct 8, 2024
Portion of a display panel with a graphical user interface
APPLIED MATERIALS INC4 citations81
USD1031743SJun 18, 2024
Portion of a display panel with a graphical user interface
APPLIED MATERIALS INC5 citations81
US12283503B2Apr 22, 2025
Substrate measurement subsystem
APPLIED MATERIALS INC3 citations73
US11668602B2Jun 6, 2023
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC2 citations71
US12191176B2Jan 7, 2025
Integrated substrate measurement system to improve manufacturing process performance
APPLIED MATERIALS INC0 citations61
US11688616B2Jun 27, 2023
Integrated substrate measurement system to improve manufacturing process performance
APPLIED MATERIALS INC0 citations61
US12405164B2Sep 2, 2025
Spatial optical emission spectroscopy for etch uniformity
APPLIED MATERIALS INC0 citations60
US12442765B2Oct 14, 2025
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
US12031910B2Jul 9, 2024
Transmission corrected plasma emission using in-situ optical reflectometry
APPLIED MATERIALS INC0 citations59
USD1045923SOct 8, 2024
Portion of a display panel with a graphical user interface
APPLIED MATERIALS INC0 citations58
US11927543B2Mar 12, 2024
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US11619594B2Apr 4, 2023
Multiple reflectometry for measuring etch parameters
APPLIED MATERIALS INC0 citations57
US12339645B2Jun 24, 2025
Estimation of chamber component conditions using substrate measurements
APPLIED MATERIALS INC0 citations51
US12216455B2Feb 4, 2025
Chamber component condition estimation using substrate measurements
APPLIED MATERIALS INC0 citations51
US12489022B2Dec 2, 2025
In-situ etch rate and etch rate uniformity detection system
APPLIED MATERIALS INC0 citations48
US11830779B2Nov 28, 2023
In-situ etch material selectivity detection system
APPLIED MATERIALS INC0 citations48
US12469686B2Nov 11, 2025
Process characterization and correction using optical wall process sensor (OWPS)
APPLIED MATERIALS INC0 citations46
US12449379B2Oct 21, 2025
Machine learning model training
APPLIED MATERIALS INC0 citations46
US12148647B2Nov 19, 2024
Integrated substrate measurement system
APPLIED MATERIALS INC0 citations46
US12467136B2Nov 11, 2025
Process characterization and correction using optical wall process sensor (OWPS)
APPLIED MATERIALS INC0 citations44
US12009191B2Jun 11, 2024
Thin film, in-situ measurement through transparent crystal and transparent substrate within processing chamber wall
APPLIED MATERIALS INC0 citations41