Inventor

CHEN CHING-HORNG

TW2 patents

Patents

2 patents

US12374530B2Jul 29, 2025

Semiconductor processing apparatus for generating plasma

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations46

US11699596B2Jul 11, 2023

Metal etching with in situ plasma ashing

TAIWAN SEMICONDUCTOR MFG CO LTD0 citations40