Inventor
TAMARU NAOKI
JP6 patents
⚠️ This page may combine multiple inventors who share the name “TAMARU NAOKI”. Patents are grouped by organization below to help distinguish them — per-person disambiguation is on the roadmap.
TOKYO ELECTRON LTD
4 patentsUS11764038B2Sep 19, 2023
Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program
TOKYO ELECTRON LTD0 citations60
US11705308B2Jul 18, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations60
US10879050B2Dec 29, 2020
Plasma processing apparatus, electrostatic attraction method, and electrostatic attraction program
TOKYO ELECTRON LTD0 citations50
US11715630B2Aug 1, 2023
Plasma processing apparatus
TOKYO ELECTRON LTD0 citations45